An Equivalent Circuit Simulation of an AC Corona Discharge Air Ionizer --Frequency Dependence of Neutralization Performance--
M. Okano1, T. Ikehata1, and T. Terashige2
1 Institute of Quantum Beam Science, Ibaraki University, Hitachi, Japan
2 Teacher Education Unit, Hiroshima International University, Hiroshima, Japan
Abstract
AC corona discharge air ionizers have been used to neutralize the static electricity in inspection process for preventing faulty operations of electronic circuits and/or devices. The neutralization performance that is a neutralizing current density (JW) and an electric field noise EW) depends on the operating conditions of air ionizers.
The equivalent circuit simulation method was proposed by using Simulation Program with Integrated Circuit Emphasis (SPICE) to find out the optimal operating condition without stopping production lines. In the simulation, the ion generation characteristic was simulated by a circuit composed of diodes and resistors. The transportation and accumulation of the ions were simulated by resistors and capacitors. The annihilation of ions based on recombination was simulated by capacitors and resistors.
In this study, we deal with the simulation for dependence on operating frequency of the neutralization performance of an AC corona discharge air ionizer. The simulated results were in good agreement with the experimental results in the frequency range from 2 to 25 Hz.
Keywords - Air ionizer, corona discharge, SPICE, simulation, neutralization performance, semiconductor manufacturing
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